New Structure Development and Key Process Technologies for Low Temperature Processed Poly-Si Thin-Film Transistors

博士 === 國立交通大學 === 電子工程系 === 90 === Utilizing polycrystalline silicon thin-film transistors (poly-Si TFT’s) as on-glass pixel switching elements and peripheral driver circuits is the future trend for fabricating active-matrix liquid-crystal displays (AMLCDs). Low-temperature processes (LTP...

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Bibliographic Details
Main Authors: Darren Chi-Hsiang Chen, 陳奇祥
Other Authors: Ching-Fa Yeh
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/24332302147599667815