High Quality LPD Insulator and its Electrical Property Due to Micro Contamination
碩士 === 國立交通大學 === 電子工程系 === 90 === As we pay more attention to effects of AMC in semiconductor manufacturing process, degradation of devices characteristics due to AMC should be avoided. We use the specially designed clean bench with different filter modules to supply different kinds of e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92921571116835209150 |