Bias effect on the growth and properties of carbon nanotubes
碩士 === 國立交通大學 === 材料科學與工程系 === 90 === In this study, two reactive gases ：CH4/H2 and CH4/CO2 are used to grow carbon nanotubes(CNTs) in bias assisted microwave plasma chemical vapor deposition (BAMPCVD) system. The bias effect on the growth and properties of carbon nanotubes is reported....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72541604718237835766 |