Control of Crystal Orientation of Ferroelectric Thin Films Grown on Metal Oxide Layers
碩士 === 國立交通大學 === 材料科學與工程系 === 90 === SBT and PTO, and PZT ferroelectric thin films were prepared by matelorganic and sol-gel method in this study. The physical and electrical properties of the dielectric films, sandwiched in a MIM structure with [110] oriented SRO or BRO as bottom electr...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/43511780381557533236 |