Statistical Monitoring Procedure for Multiple Readings from Multiple Quality Characteristics with EWMA Control Charts
碩士 === 國立交通大學 === 工業工程與管理系 === 90 === An increasing number of wafer fabrication manufacturers use a control chart to effectively monitor the wafer manufacturing process. However, conventional control charts are designed for detecting a manufacturing process with single source of variation...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04947853875552593602 |