Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === ABSTRACT In this thesis we study the moisture purge/dry-down process in a heated curved pipe. Curved pipes constitute a substantial part in gas control modules that are widely used in the semiconductor industry. The purge/dry-down process is essential since...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/uh75k4 |