Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === ABSTRACT In this thesis we study the moisture purge/dry-down process in a heated curved pipe. Curved pipes constitute a substantial part in gas control modules that are widely used in the semiconductor industry. The purge/dry-down process is essential since...

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Main Authors: Chia-Feng Yeh, 葉佳峰
Other Authors: Tian-Shiang Yang
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/uh75k4
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spelling ndltd-TW-090NCKU54901482018-06-25T06:05:46Z http://ndltd.ncl.edu.tw/handle/uh75k4 Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages 熱傳效應對氣體流道肅氣乾燥時間之影響 Chia-Feng Yeh 葉佳峰 碩士 國立成功大學 機械工程學系碩博士班 90 ABSTRACT In this thesis we study the moisture purge/dry-down process in a heated curved pipe. Curved pipes constitute a substantial part in gas control modules that are widely used in the semiconductor industry. The purge/dry-down process is essential since semiconductor fabrication processes strictly demand high purity (in particular, low humidity) of the process gases. Also, one of the central issues here is to shorten the purge/dry-down time required to reduce the moisture content of the process gas to a satisfactory level, so as to reduce the equipment warm-up time after regular or accidental maintenance, thereby increasing the average productivity of the equipment. Here we successfully combine theories of fluid mechanics, heat and mass transfer, and moisture adsorption/desorption dynamics on metals, to develop a complete model for the moisture purge/dry-down process. On the basis of the theoretical model, we carry out systematic numerical simulations of the purge/dry-down process. For a particularly chosen pipe geometry, the effects of wall heat flux and flow rate on the purge/dry-down time are investigated. The numerical results indicate that increasing the wall heat flux would shorten the purge/dry-down time, as it raises the average wall temperature. Meanwhile, for a particular wall heat flux, increasing the flow rate would shorten the time required for the moisture content of the exit gas to reduce to a preset low level. However, since increasing the gas flow rate also has the side effect of cooling down the pipe wall, the time required to completely purge the moisture preexistent in the pipe would actually become longer. These findings are expected to be useful for purge/dry-down process optimization. Tian-Shiang Yang 楊天祥 2002 學位論文 ; thesis 97 zh-TW
collection NDLTD
language zh-TW
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description 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === ABSTRACT In this thesis we study the moisture purge/dry-down process in a heated curved pipe. Curved pipes constitute a substantial part in gas control modules that are widely used in the semiconductor industry. The purge/dry-down process is essential since semiconductor fabrication processes strictly demand high purity (in particular, low humidity) of the process gases. Also, one of the central issues here is to shorten the purge/dry-down time required to reduce the moisture content of the process gas to a satisfactory level, so as to reduce the equipment warm-up time after regular or accidental maintenance, thereby increasing the average productivity of the equipment. Here we successfully combine theories of fluid mechanics, heat and mass transfer, and moisture adsorption/desorption dynamics on metals, to develop a complete model for the moisture purge/dry-down process. On the basis of the theoretical model, we carry out systematic numerical simulations of the purge/dry-down process. For a particularly chosen pipe geometry, the effects of wall heat flux and flow rate on the purge/dry-down time are investigated. The numerical results indicate that increasing the wall heat flux would shorten the purge/dry-down time, as it raises the average wall temperature. Meanwhile, for a particular wall heat flux, increasing the flow rate would shorten the time required for the moisture content of the exit gas to reduce to a preset low level. However, since increasing the gas flow rate also has the side effect of cooling down the pipe wall, the time required to completely purge the moisture preexistent in the pipe would actually become longer. These findings are expected to be useful for purge/dry-down process optimization.
author2 Tian-Shiang Yang
author_facet Tian-Shiang Yang
Chia-Feng Yeh
葉佳峰
author Chia-Feng Yeh
葉佳峰
spellingShingle Chia-Feng Yeh
葉佳峰
Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
author_sort Chia-Feng Yeh
title Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
title_short Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
title_full Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
title_fullStr Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
title_full_unstemmed Effects of Heat Transfer on Purge/Dry-down Time of Gas Passages
title_sort effects of heat transfer on purge/dry-down time of gas passages
publishDate 2002
url http://ndltd.ncl.edu.tw/handle/uh75k4
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