Development of Fabrication Process Simulator and Electro-Mechanical coupling Solver for MEMS CAD
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === Computer aided design (CAD) is a key issue in development for all engineering products. In MEMS, it is important to reduce the lead-time and to accelerate the product development by CAD.As a result, the development of MEMS CAD has significant contributions to...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/d9z2h2 |