Micro/Nano Mechanical, Material Properties and Tribological Performance of a-C:H(N) Thin Films Deposited by Low-Temperature Ion Beam Process
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === The adhesion effects to the load-depth curves of nano-indentation test and the theoretical relation of micro/nano hardness are researched in this study. The effect of nitrogen containing and film thickness to the a-C:H and a-H(N) diamond like carbon film struc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g3us7g |