The Design and Manufacture of Poly-Silicon Thin Film Cantilever Beam
碩士 === 國立中興大學 === 機械工程學系 === 90 === ABSTRACT The design and manufacture of a thin film cantilever made of poly-silicon is conducted in this investigation. A 4-inch silicon wafer with (100) orientation is used as the substrate. The poly-silicon thin film cantilevers in different...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62450866641050304077 |