Optimum design of CVD process

碩士 === 國立中興大學 === 化學工程學系 === 90 ===

Bibliographic Details
Main Author: 利鴻正
Other Authors: 鄭文桐
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/82816451460767330537
id ndltd-TW-090NCHU0063014
record_format oai_dc
spelling ndltd-TW-090NCHU00630142016-06-27T16:09:32Z http://ndltd.ncl.edu.tw/handle/82816451460767330537 Optimum design of CVD process 化學氣相沉積製程最適化設計 利鴻正 碩士 國立中興大學 化學工程學系 90 鄭文桐 2002 學位論文 ; thesis 78 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立中興大學 === 化學工程學系 === 90 ===
author2 鄭文桐
author_facet 鄭文桐
利鴻正
author 利鴻正
spellingShingle 利鴻正
Optimum design of CVD process
author_sort 利鴻正
title Optimum design of CVD process
title_short Optimum design of CVD process
title_full Optimum design of CVD process
title_fullStr Optimum design of CVD process
title_full_unstemmed Optimum design of CVD process
title_sort optimum design of cvd process
publishDate 2002
url http://ndltd.ncl.edu.tw/handle/82816451460767330537
work_keys_str_mv AT lìhóngzhèng optimumdesignofcvdprocess
AT lìhóngzhèng huàxuéqìxiāngchénjīzhìchéngzuìshìhuàshèjì
_version_ 1718325351220772864