Study on the optical parameters and thin film’s thickness by polarization modulation spectroscopic ellipsometer
碩士 === 逢甲大學 === 電子工程所 === 90 === The study of this paper focus on the need of the industry of semiconductor. The process of semiconductor is large amount of product, good yielding, high speed. It is necessary to develop a system of monitor on line. Ellipsometer use the character of the polariz...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/tqbtef |