Effect of Preparation conditions of Sol-Gel Process on BST Target，and Structure and Dielectrics of Sputtering Thin Film
碩士 === 長庚大學 === 化學工程研究所 === 90 === The objectives of this research are to prepare powders, targets, and sputter-deposited thin films of barium strontium titanates (BST) by sol-gel process and to investigate the effects of the sol-gel processing conditions on the properties of these materi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07099221115305585259 |