The development of CAD/CAM system for excimer laser fabrication
碩士 === 國立中正大學 === 機械系 === 90 === Recently excimer laser has become an increasingly important tool for use in micromachining and micro fabrication, because the advantages of the system design and manufacture characteristics. Although the excimer laser technology can achieve sub micron machining, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53161501241727548114 |