The development of CAD/CAM system for excimer laser fabrication
碩士 === 國立中正大學 === 機械系 === 90 === Recently excimer laser has become an increasingly important tool for use in micromachining and micro fabrication, because the advantages of the system design and manufacture characteristics. Although the excimer laser technology can achieve sub micron machining, the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53161501241727548114 |
| Summary: | 碩士 === 國立中正大學 === 機械系 === 90 === Recently excimer laser has become an increasingly important tool for use in micromachining and micro fabrication, because the advantages of the system design and manufacture characteristics. Although the excimer laser technology can achieve sub micron machining, the system integration with accurate computer control is needed. Therefore, objective of this research is to develop the CAD/CAM system based on excimer laser fabricating characteristics. The main purpose of this thesis is to promote the usage of 3D microstructure fabrication by using excimer laser machining technology.
In the research we focus on the computer simulate and animation of different machining control method for excimer laser direct write process on 3D microstructures. The analyses results include surface contour error and fabrication efficiency. By comparing the advantage and disadvantage for different control methods, a new fabrication method is presented in this thesis that improved the previous results. We hope this study can promote the further research on 3-D microstructure fabrication by using excimer laser machining.
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