The Electro Mechanical Integration and Performance Analysis of Micro Precision Stage

• Main Authors: Yen-Lang Chu, 朱延朗
• Other Authors: Jyun-Cheng Cheng
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/10975485558199659502

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 89 === In the position of the stage, the control of the motor has been an important role. Ultrasonic motors have outstanding performance, and therefore being applied increasingly in the industry. The PC-Based panel has many advantages, such as open and expansibility, and thus being used popularly. The purpose of the study is to design the PC-Based panel with Visual Basic 6.0 programming language on the Micro Precision stage with ultrasonic motors. The performance analysis of the stage was done with the assistance of HP 5529A, HEIDENHAIN Encoders, HP Dynamic Signal Analyzer , LVDT and etc, in order to understand the dimension accuracy, geometry accuracy, dynamic performance and vibrations of the stage. Meanwhile, the reason of errors and performance improvement are the two main issues in this research to provide technique basis for precision manufacturing in the future.