利用sol-gel（溶膠-凝膠法）製作矽質薄膜之研究
碩士 === 中國文化大學 === 材料科學與製造研究所 === 89 === The fabrication of silica thin film can be carried out by sol—gel process. This method is simple、low cost、rapid、well-controllable and compatible with existing fabrication technologies. The silica thin film was made from mixing of TEOS、H2O、C2H5OH an...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31487723401470489219 |