| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 89 === The purpose of this project is to design, analyze, and use the Micro-Electro-Mechanical System (MEMS) technologies to build the PZT high-frequency switch and the variable capacitor with the feedback control loop.
According to the simulation of the displacement of the switch by the Finite Element Method, by applying 5~10V actuation voltage to each PZT actuating beams causes these beams moving upward or downward in order to achieve the two-way switching choices (ON/OFF). In the high frequency transfer mode, ON state has a very low Insertion Loss. In the low frequency transfer mode, Signal Isolation can be achieved under the OFF state.
Base on the architecture of the PZT high-frequency switch, the capacitor have a wide variable range of capacitance value, between 2~80 pF. Applying the tunable capacitor to a filter, in conjunction with the feedback circuitry, the values of the capacitor will continuously change, which implies the input range of the filter, is continuous and controllable
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