動態規劃法應用於半導體廠製程排氣系統之設計
碩士 === 國立臺灣大學 === 機械工程學研究所 === 89 === The major purpose of the process exhaust system for a semiconductor factory is to discharge the waste gas from the manufacturing semiconductor. It must consider flow rate, velocity, space limitation, and reduce the cost in designing the process exhaust system. T...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61355789982094909720 |