Formation and Mechanism of Stable Point Ion/Electron Sources

• Main Authors: Ben-Li Sheu, 許本立
• Other Authors: Yuh-Lin Wang
• Format: Others
• Language: en_US
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/07605091152695716546

碩士 === 國立臺灣大學 === 物理學研究所 === 89 === A very stable dual ion/electron point source has been successfully fabricated based on a Au-In alloy liquid metal ion source. Field electron microscopy is employed to examine the pattern of electron emission from the Au-In tip, which has been solidified during an ion emission condition. Emission properties and formation of a single cone electron source on the solidified Au-In source are studied. Compared to the In dual ion/electron source prepared under similar conditions, the Au-In source exhibits much enhanced stability and maintains a single point electron emitter to a much higher emission current. With its stable ion and electron emission as well as good electron emission brightness (~2 x 108 A/sr‧cm2), the Au-In dual ion/electron source is a potential candidate for a single column focused ion/electron beam system.