| Summary: | 碩士 === 國立臺灣大學 === 物理學研究所 === 89 === Nitrides are versatile and various and is of growing importance. However, studies about nitrides are very few and limited, partially due to the inconvenience of oxidation of nitrides in air.
We've constructed a environment handling nitrides, containing Pulsed Laser Deposition growth system, X-ray and MOKE measurement system.
Consequently we've tried growing thin film of Ca3N2 and superconducting CaTaN2 , which are represents of binary and ternary nitrides. Although we did not succeed in thin film growth, we've learned valuable experiences and techniques from the process.
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