Design and Development of a Variable Angle Spectroscopic Ellipsometry
碩士 === 國立臺灣大學 === 光電工程學研究所 === 89 === Abstract A variable-angle spectroscopic ellipsometry (VASE) based on the configuration of a fixed polarizer, a rotating polarizer, sample, and a fixed analyzer (PRPSE) is constructed. This configuration eliminates the errors from light source residual...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83164941609565759865 |