The Application of the Infrared Radiation Thin — Film Thermopile
碩士 === 國立海洋大學 === 電機工程學系 === 89 === A multi-layer technology for manufacturing thin — film thermopile sensor is investigated . The device uses a series — connected of thermocouples whose hot junctions are supported on a membrane formed using anisotropic etching . The membrane size and the...
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| Format: | Others |
| Language: | en_US |
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2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99310654968881058033 |
| Summary: | 碩士 === 國立海洋大學 === 電機工程學系 === 89 === A multi-layer technology for manufacturing thin — film thermopile sensor is investigated . The device uses a series — connected of thermocouples whose hot junctions are supported on a membrane formed using anisotropic etching . The membrane size and the thermocouple numbers control the speed and responsivity of the structure , which can be designed for any application .
This study reports a thermopile structure using BiSb — NiCr layers that are compatible in JFET technology . From the results of the thin-film thermopile device , the maximum value of voltage response is about 330 V/W and the maximum detectivity 1.7E+10 cmHz1/2 at the same chopper frequency . We also compared some properties of commercial thermopile sensor and fabricated device . In addition , a microsensors based on an integrated thermopile and amplifier were designed and fabricated on a chip primarily also .
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