The Application of the Infrared Radiation Thin — Film Thermopile
碩士 === 國立海洋大學 === 電機工程學系 === 89 === A multi-layer technology for manufacturing thin — film thermopile sensor is investigated . The device uses a series — connected of thermocouples whose hot junctions are supported on a membrane formed using anisotropic etching . The membrane size and the...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99310654968881058033 |