Study on Characteristics and Reliability of Low Temperature Polycrystalline Silicon Thin-Film Transistors
碩士 === 國立清華大學 === 電子工程研究所 === 89 === High performance LTPS TFTs with mobility above 100cm2/V-sec and on/off current ratio beyond 108 have been fabricated by both excimer laser crystallization (ELC) and metal-induced lateral crystallization (MILC) methods. Comparing the two different proce...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01047658922969320315 |