Design and Fabrication of Micro Deformable Cylindrical Mirrors
碩士 === 國立清華大學 === 動力機械工程學系 === 89 === A micro deformable cylindrical mirror which is electrostatically actuated to perform line focusing has been successfully designed, analyzed, fabricated, and measured in this thesis. The bimetallic effect is utilized to generate the stress-induced ben...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16462640079631539171 |