Design and Fabrication of Micro Deformable Cylindrical Mirrors
碩士 === 國立清華大學 === 動力機械工程學系 === 89 === A micro deformable cylindrical mirror which is electrostatically actuated to perform line focusing has been successfully designed, analyzed, fabricated, and measured in this thesis. The bimetallic effect is utilized to generate the stress-induced ben...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16462640079631539171 |
| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 89 === A micro deformable cylindrical mirror which is electrostatically actuated to perform line focusing has been successfully designed, analyzed, fabricated, and measured in this thesis. The bimetallic effect is utilized to generate the stress-induced bending of a bi-layer mirror structure, which successfully formed a cylindrical reflective surface and can focus incident light into a line at its focal length. Electrostatic force is used to attract the structure downward and thus to change the focal length of the mirror. Simulated results show that the mirror has a larger focal length under a larger driving voltages. The micro deformable cylindrical mirror is fabricated using surface micromachining and the experimental results indicate that the focal length of the mirror with a reflective area of 300-micron square is 1819.21 without driving voltage. The micro deformable cylindrical mirror can be used to make up a double cylindrical mirror device which can perform point focusing.
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