Effects of plasma characteristics on the thin film synthesis in one-component and two-component single phase systems
博士 === 國立清華大學 === 材料科學工程學系 === 89 === In this study, we discussed the effects of plasma characteristics on the synthesis of materials. Three major topics were included : (1) how the plasmas affect the deposition of one-component single phase diamond films, (2) how the plasmas affect the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50836194887959722070 |