Optical Disk Mastering Using Optical Super Resolution Effect
碩士 === 國立交通大學 === 光電工程所 === 89 === The objective of this research is to study an innovative lithography using the effect of thermal-induced super resolution, and to demonstrate that the technique can effectively reduce the exposed pit width on the photoresist layer. The techniq...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79782099501060656366 |