Experimental Investigation of Thermal Radiative Properties for (Ba,Sr)TiO3 (BST) Thin Films
碩士 === 國立交通大學 === 機械工程系 === 89 === ABSTRACT Barium strontium titanate (Ba,Sr)TiO3 (BST) thin films are being widely investigated as alternative dielectrics for ultra large scale integrated circuits (ULSIs) DRAM storage capacitors due to its high dielectric constant, low leakage current, s...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/73948032065796345420 |