Construction of 2.5D microstructure using multiple layers of SU-8 photoresist
碩士 === 國立交通大學 === 機械工程系 === 89 === The purpose of this research is to produce a nickel structure by using the UV-LIGA technology. Through the second coating of SU-8 thick photoresist and electroplating, the structure with more shape-changes can be produced. The processes of producing the components...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14918050315818294603 |