Study of Small Dimension Polycrystlline Silicon Thin Film Transistors
碩士 === 國立交通大學 === 電子工程系 === 89 === In this thesis, small dimension poly-Si TFTs with different dimensions, poly-Si film thickness, and grain size are fabricated and characterized successfully. In addition, the multichannel devices were chosen to investigate the influence of channel sidewa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85196214621683370180 |