A Study of 2-D Electromagnetic Micromirror Actuators

• Main Authors: Chih-Hung Chen, 陳志鴻
• Other Authors: Dr.Yu-Chung Huang
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/24596239752218275551

碩士 === 國立交通大學 === 電子工程系 === 89 === A Study of 2-D Electromagnetic Micromirror Actuators Student: Chih-Hung Chen advisor: Dr.Yu-Chung Huang Department of Electronics Engineering and Institute of Electronics National Chiao Tung University Abstract This research demonstrate a 2-D electromagnetic micromirror which is fabricated by bulk micromachining technology. For COMS process compatibility we choose pre-CMOS process, use aluminum as the metal lines and TMAH etchant to etch silicon. Bulk micromechining is using etchant to etch substrate to form micro-structure . Any process following this step will destroy the microstructure. Since we fabricate microstructure after all process. We intensely recommend this process we have performed. The devices has were completed and to tested and verified the theory. Keyword: Bulk Micromachining , 2-D electromagnetic micromirror