A Study of 2-D Electromagnetic Micromirror Actuators
碩士 === 國立交通大學 === 電子工程系 === 89 === A Study of 2-D Electromagnetic Micromirror Actuators Student: Chih-Hung Chen advisor: Dr.Yu-Chung Huang Department of Electronics Engineering and Institute of Electronics National Chiao Tung University...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24596239752218275551 |
| Summary: | 碩士 === 國立交通大學 === 電子工程系 === 89 === A Study of 2-D Electromagnetic Micromirror Actuators
Student: Chih-Hung Chen advisor: Dr.Yu-Chung Huang
Department of Electronics Engineering and Institute of Electronics
National Chiao Tung University
Abstract
This research demonstrate a 2-D electromagnetic micromirror which is fabricated by bulk micromachining technology. For COMS process compatibility we choose pre-CMOS process, use aluminum as the metal lines and TMAH etchant to etch silicon. Bulk micromechining is using etchant to etch substrate to form micro-structure . Any process following this step will destroy the microstructure. Since we fabricate microstructure after all process. We intensely recommend this process we have performed. The devices has were completed and to tested and verified the theory.
Keyword: Bulk Micromachining , 2-D electromagnetic micromirror
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