Plasma Effect on Liquid-Phase Deposited Insulator
碩士 === 國立交通大學 === 電子工程系 === 89 === To reduce the probability of moisture uptake and to strength the adhesion between MSQ/liner-LPD and copper, the improvement of liner LPD-SiO2 deposited on MSQ is studied. In this work, to make LPD-SiO2 deposited on MSQ film, we adopted H2 plas...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58626910761080000884 |