Hotelling T2 Control Chart for Defects in IC Fabrication using Cluster Index
碩士 === 國立交通大學 === 工業工程與管理系 === 89 === For the integrated circuits (IC) manufacturer, the clustering of defects on a wafer due to the complicated manufacturing process becomes more evident with increased wafer size. The defect clustering phenomenon causes the Possion based c-chart invalid. Many modif...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99929680432663330493 |