Constructing On-Line Control System for Multiple Readings
碩士 === 國立交通大學 === 工業工程與管理系 === 89 === The IC wafer manufacturing is the most competitive field in high technology industry. The wafer quality plays an important role of assessing the competition ability of wafer manufacturers. Therefore, how to enhance both of the quality and quantity of wafers to s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rx4h72 |
| Summary: | 碩士 === 國立交通大學 === 工業工程與管理系 === 89 === The IC wafer manufacturing is the most competitive field in high technology industry. The wafer quality plays an important role of assessing the competition ability of wafer manufacturers. Therefore, how to enhance both of the quality and quantity of wafers to satisfy customer’s requirements becomes a more and more important issue. The objective of this study is to develop an on-line control system computer software for detecting multi-variations (within-wafer variation, wafer-to-wafer variation and lot-to-lot variation) for multiple readings on wafer surface in the wafer manufacturing process. Using the software to simplify the control procedure, three different sources of variation can be separated and engineers can find the sources of variation easily. The quality of wafers and manufacturing process can then be promoted efficiently.
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