Design and Fabrication of Microelectrodes for Neural Prosthesis by MEMS Technology

• Main Authors: Hsin-Jun Jian, 簡欣鈞
• Other Authors: Ming-Shaung Ju
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/92382367068655002025

碩士 === 國立成功大學 === 機械工程學系 === 89 === The development of a neural prosthesis, may involve many technologies such as tissue engineering, RF telemetry technology and MEMS Technology. In particular, the microelectrode plays an important role in neural prosthesis and it can be fabricated by MEMS technology. By using this technology an electrode with higher selectivity and minimum invasion can be achieved. Since electrodes that are compact, miniaturized and with array electrodes can be developed. The major applications of the microelectrodes include: neural electrical stimulation and neural signal recording. The goals of this research thesis have two-folds: the first is the design and development of microelectrodes and the second is the application of the microelectrodes. Silicone rubber is selected as a substrate for the electrodes. The first electrode is a planar electrode and with 18 poles and the second one has saw-tooth surface with 45 ploes and it is developed by using the excimer laser lithography technology. Home rabbits are employed for animal experiments. The planar electrodes are placed underneath the sciatic nerve of rabbits and the ENG is recorded when the animal’s ankle is flexed/extended from neutral position. Two channels of ENG were measured and a first order model was fitted to describe the dynamics of the sensory system by using ENG as the input and ankle angle as the output. In addition, a nerve block test by using anesthetics was performed and it was verified that the signals measured were originated from nerve. In summary, a planar microelectrode system was successfully developed by using the MEMS technology.