Sputtering AlN Films on ST-X Quartz and Y-128° LiNbO3
博士 === 國立成功大學 === 電機工程學系 === 89 === Highly c-axis-oriented and fine structural AlN films were successfully prepared on ST-X quartz and Y-128° LiNbO3 by rf magnetron sputtering. The crystalline structure of the films was determined by X-ray diffraction (XRD) and the surface microstructure of films wa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83767066558777022197 |