Process parameters and grain boundary effect of La-Sr-Mn-O thin film magnetoresistance
碩士 === 國立成功大學 === 材料科學及工程學系 === 89 === The La0.67Sr0.33MnO3-δ (LSMO) film was deposited onto the Si[100]/SiO2 substrate and the single grained YBCO bi-crystal substrate by rf sputtering. The deposition parameters of LSMO were determined by the “Taguchi Method” based on the MR ratio. It is shown th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37077568087512249785 |