Deposition of Multi-Functional Thin Films using an Inductively-Coupled-Plasma assisted Magnetron Sputtering method
碩士 === 國立成功大學 === 化學工程學系 === 89 === 英文摘要(Abstract) The industrial demands for high precision mold processing have increased gradually. Since the molds were gradually wore out during processing, the heat treatment and the electro-plating for hardening the mold surface are no lon...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02118567370360752616 |