Microactuator and Their Applications on Micro-Optics / Micro Grippers
碩士 === 國立成功大學 === 工程科學系 === 89 === Design and fabrication of several microactuators by using micromachining techniques and MEMS technology are described in the present study. Based on their operation principles, the actuators have been classified into three categories. (1) Electro-thermal...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73982649865066885301 |