Design and Fabrication of High-throughput Microfluidic Chips and Their Applications on Bio-medical Analysis

• Main Authors: Guan-Ruey Huang, 黃冠瑞
• Other Authors: Gwo-Bin Lee
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/44324311128370381826

碩士 === 國立成功大學 === 工程科學系 === 89 === Design and fabrication of microfluidic devices on quartz and polymethylmethacrylate (PMMA) substrates for analytical chemistry and biomedical-related applications using micromachining techniques and MEMS (Micro-Electro-Mechanical-Systems) technology are described. Four microfluidic devices are demonstrated in this study and described as follows. (1)Micro-capillary electrophoresis chip: A micro capillary electrophoresis (m-CE) device for DNA separation and detection is demonstrated. It is fabricated on quartz and PMMA substrates. The capability of the fabricated chip for electrophoretic injection and separation is characterized via the analysis of DNA fragments fX-174-RF Hae III digest. Experimental results indicate that all of the 11 DNA fragments of the size marker could be identified in less than 2 minutes (2)Flow-through sampling microchip: A novel microfluidic chip for continuous sample injection has been developed. The capability of the microchip for continuous mode of sample introduction is demonstrated successfully. (3)Micromachined pre-focused 1×N flow switch for continuous sample injection: The micro flow switch integrates two important microfluidic phenomena, including hydrodynamic focusing and valveless flow switching on a planar structure. Experimental data indicate that pre-focused micro flow switch could guide sample flow to a desired outlet port successfully. (4)Micromachined pre-focused M×N flow switches for continuous sample injection: Multiple samples could be pre-focused to narrow streams and then continuously injected into desired outlet-ports using this chip. The microfluidic chip could be used for high-throughput chemical analysis. In this study, a simple but reliable one-mask micromachining process is developed to fabricate the microfluidic devices. The image of microstructures is transferred from quartz master templates possessing the inverse image of the devices to plastic plates by using hot embossing methods. The micro channels on quartz master templates are formed by the combination of metal etch mask and wet chemical etching of a photomask blank. The micromachined quartz templates can be used repeatedly to replicate cheap and disposable plastic devices. Experimental data show that these four microfluidic devices can by applied for chemical analysis successfully.