The Analysis and Control of Vacuum Robot of Cluster Tools
碩士 === 中原大學 === 機械工程研究所 === 89 === Because Cluster Tools can integrate many process modules to increase the yields, it has become the main equipment gradually in semiconductor fields. In Cluster Tools, the vacuum robot is responsible for transferring the wafer between different process modules...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80917658533874567777 |
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