| Summary: | 碩士 === 國立中正大學 === 機械系 === 89 === With the progress of science and technology recently, it also requests dramatically in the high precision machinery, manufacturing or the precision of semiconductor manufacture. However, in spite of dealing the problems of positioning, cutting or high rotational speed, it can’t get rid of the effects of vibration disturbance in limitation of the high pursued precision of work. To attenuate the effects of vibration disturbance, a passive isolation system, which has been widely used in industry. Nevertheless, it will be limited by using the way of passive isolation so as to limiting the vibration reduction because of the property of materials. In the past decade, active or active-passive isolation systems have been developed and have proved to be more effective designs for vibration control.
In this thesis, there are three major parts in our approach. First, we introduced the property of active-passive isolation system and derived the dynamic equation of the single-axis active-passive isolation system. Analysis is performed to understand more physical design principle of the active-passive configuration. Then we integrate a hybrid control which are a feedback robust controller and a feedforward filtered-x LMS adaptive controller, and applying the control theorem to one design. With our hybrid control ,the transient and steady state response are greatly improved by using the integrated control design. The second part of the thesis is to come from the experience of experiments and the consideration of theories, it is not easy to get the high relation feedforward signal from the original designed system. Therefore, we propose a new active-passive isolation system and derived its dynamic equation and do control- simulation in order to meet the goal of isolate the vibration, and also do simulation to probe into its feasibility applying the hybrid control. Finally,the three part of the thesis is to perform closed loop experiments using the active feedback robust controller designed way to prove the effects of vibration reduction.
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