| Summary: | 碩士 === 國立臺灣科技大學 === 機械工程系 === 88 === In this thesis, the pure In2O3 and NiO powders were prepared by sol-gel method using non alkoxide precursor In(NO3)3．5H2O and Ni(NO3)2．6H2O. The gel were calcined in air at 600℃. The disk shape humidity sensors were formed using an uniaxial die press operated at 100 MPa. The sintering treatment were carried out for various temperature ranging from 800℃ to 1200℃.
Due to using of sol-gel method to produce the powders, it results in a higher surface area. The lower sintering temperature provided a porous microstructure. Doping with NiO has been found to increase the resistivity of specimens, which affect the humidity-sensing characteristics. Through numerous humidity tests and microstructure observations, In2O3-1mol% NiO sintered at 800℃ exhibited excellent reproducibility and response time.
Key Words: Ceramic humidity sensors, Indium oxide, Nickel oxide, Sol-gel method, Sintering
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