Micropostioning thickness control system of photoresist lay on LCD back-lighted glass plate
碩士 === 國立臺灣大學 === 機械工程學研究所 === 88 === The study researches a micropositioning plate and a long-range mechanism. After combining, the whole system could be applied on lying photoresist on LCD back-lighted glass plate. For the thickness control needs of micrometer, the study offe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99782419263778470861 |