| Summary: | 碩士 === 國立臺灣大學 === 電機工程學研究所 === 88 === Vertical-Cavity Surface Emitting Lasers (VCSELs) have become a focus of research over the past several years due to their promising appli-cation in areas such as optical communications, optical interconnections, optical networks, optical signal processing. VCSELs characteristics, such
as low threshold current and single mode operation. As well as their ability to be fabricated in high-density arrays, make them an ideal device for use optoelectronic integrated circuits . In applications where polarization sen-sitive components are widely used, such as magneto-optic recording and coherent detection systems, the ability to effectively control the polarization of the VCSELs is a necessity.
In the paper, we use both Zinc diffusion and selective lateral etching technologies. Zinc diffusion is used to low down the series resistance of the lasers, and control the aperture of devices by lateral diffusion. The selective lateral etching con confine current effectively . With these, we make surface emitting lasers successfully. The threshold current of device is 3mA, and the maximum output power is 800 uw, and the polarization direction almost along [011]. A maximum polarization distinction ratio is 20 dB at I =17 mA,
In the experiment . We observe as the size of aperture is increasing , the polarization is more stability.
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