Micromachined CPW Filter Design and Analysis using Finite Element Method

• Main Authors: KUO-TAI LEE, 李國泰
• Other Authors: Ruey-Beei Wu
• Format: Others
• Language: zh-TW
• Published: 2000
• Online Access: http://ndltd.ncl.edu.tw/handle/75462140577188393272

碩士 === 國立臺灣大學 === 電信工程學研究所 === 88 === In this thesis, we try to design a gap coupled filter by using MEMS (Micro-Electronic-Mechanical-System) technique. This technique can provide a structure of membrane and package, which can prevent the circuit from the defect inherent in the traditional structure, e.g., the dielectric loss, radiation loss, and dispersion. On the whole, a MEMS structure can be looked as a rectangular waveguide . As a result, it also has the advantage of waveguide, such as the characteristic of low loss, easy design, high quality factor, and high efficiency of power transmission. We shall make use of these advantages to design a narrow band pass filter. Because of the unregular shape, it is difficult to find an appropriate formulation when designing a circuit in MEMS structure. Throughout this thesis, the finite element method is applied in analyzing this structure, and the modal expansion theorem is also adopted to get the S-parameter of the circuit. Finally, by applying the filter design rule, we can make use of the calculated S-parameter to design a filter in specification.