A Decision Model for Tool Portfolio Planning in Semiconductor Manufacturing
碩士 === 國立臺灣大學 === 工業工程學研究所 === 88 === A full-scale semiconductor wafer manufacturing plant contains more than one hundred types of machines, and the quantity of machines may be as high as 300 to 400. A resource portfolio refers to the makeup, in quantity and type, of the set of processing...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64200597762069167535 |